Impurity Analysis in Bulk Gas

High-purity gas is necessary in industries such as semiconductors, medical, and foods. Since especially trace impurities affect semiconductor processes, impurities in bulk gas are analyzed with a gas chromatograph. This example presents an analysis of ppb order impurities in hydrogen bulk gas with a system GC. A PDD was used to detect a trace amount of impurities.

System GC

Conventional gas chromatographs require skilled operatorsto ensure precise analysis. By utilizing valve actuation to switch flow lines, system GCs provide key advantages over conventional systems for operators, such as automatic sampling, more precise analysis, and analytical time savings.