XPS
XPS X-ray Photoelectron Spectroscopy
- High Resolution Spectroscopy and Selected Area Spectroscopy
- Quantitative Parallel Imagingr
- Charge Neutralisation
- Large Sample Handling
- Delay-Line Detecto
System Functions
X-ray photoelectron spectroscopy (XPS), also known as ESCA (electron spectroscopy for chemical analysis) is a surface analysis technique which provides both elemental and chemical state information virtually without restriction on the type of material which can be analysed.