EPMA
EPMA Electron Probe Microanalyzer
High Sensitivity, High Accuracy, High Resolution, and Easy-to-Understand Operation
System Functions
Electron Probe Micro Analyzer(EPMA) is one of the instruments to analyze solid substances. EPMA works by bombarding a sample with an accelerated and focused electron beam that cause various interactions between the electron of beam and the atoms of all elements included in the sample.